RF-sputtering Substrate temperature Tantalum Thin films
Issue Date:
1999
Publisher:
Scopus
Citation:
Journal of Magnetism and Magnetic Materials
Series/Report no.:
Volume: 193 Issue: 3-Jan Page : 117-120;
Abstract:
In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5
compositions) on magnetic and structural properties of Co-Cr-Ta perpendicular media samples grown on Si
substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr
13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of
Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum
magnetic and structural properties. ?? 1999 Elsevier Science B.V. All rights reserved.
