Annealing Coercive force Deposition Grain size and shape Iron compounds Magnetic properties Magnetron sputtering X ray diffraction FePt High density magnetic recording materials L10 ordered structure Magnetocrystalline anisotropy constant Thin films
Issue Date:
2005
Publisher:
Journal of Magnetism and Magnetic Materials
Citation:
Volume 290-291 PART 1, Page 559-561
Abstract:
Fe56Pt44 thin films have been prepared by RF magnetron sputtering on Si substrates. The
substrate temperature was kept at 350?C. The X-ray diffraction patterns of as-deposited FePt films exhibited
a disordered structure. Annealing of the films at 650-685?C for 1 h yielded an ordered L10 phase with FCT
structure. The high value for coercivity HC of 17 kOe was obtained at room temperature for the 68 nm thick
film annealed at 685?C. The hard magnetic properties as well as grain structure of the films strongly depend
on the annealing conditions. ?? 2004 Elsevier B.V. All rights reserved.
